Use of thermally induced higher order modes of a microcantilever for mercury vapor detection

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Permanent URL	http://hdl.lib.byu.edu/1877/481
Title	Use of thermally induced higher order modes of a microcantilever for mercury vapor detection
BYU Creator	Nordin, Gregory P.
Creator	George, Michael A. Kadam, Ashwini R.
Keywords	microcantilever; mercury; vapor detection
Description/Abstract	We demonstrate the use of thermally induced higher order modes of a microcantilever as an alternate detection technique by studying Au-Hg interactions. The first four thermally induced flexural modes - i.e., the fundamental and first three higher order modes - have been examined for two different Au coatings. In the first case, 50 nm thick Au is sputter deposited along the entire length of a rectangular Si microcantilever. In the second case the Au is confined to a 30 µm length at the tip of the Si microcantilever. In both cases the microcantilever spectral response and deflection has been studied as a function of Hg concentration and total exposure time. For the low doses studied, the higher order modes show a distinct Hg sensing response whereas the fundamental mode does not. The frequency shift for the fourth order mode for a total exposure of 300 s to approximately 15 ppb Hg in N2 is found to be -320 and -70 Hz for the first and second cases, respectively.
Source	Ashwini. R. Kadam, G. P. Nordin, and Michael A. George, "Use of thermally induced higher order modes of a microcantilever for mercury vapor detection" J. Appl Phys. 99, 094905 (2006);
Publisher	American Institute of Physics
Date Original	2006
Date Digital	2007-06-08
Language	English eng en
Publication Type	Peer-Reviewed Articles
Type	Text
Format	application/pdf
Owning Institution	Brigham Young University
BYU College	Ira A. Fulton College of Engineering and Technology
BYU Department	Electrical and Computer Engineering
Copyright Status	(c) 2006 American Institute of Physics, Journal of Applied Physics; http://jap.aip.org/jap/;
Copyright Use Information	http://www.lib.byu.edu/generic_copyright.html

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Use of thermally induced higher order modes of a microcantilever for mercury vapor detection

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