x-rays; soft x-rays; extreme ultraviolet (EUV); ellipsometry and polarimetry; optical properties; metals; harmonic generation and mixing
We use laser high-order harmonics and a polarization-ratioreflectance technique to determine the optical constants of copper and oxidized copper in the wavelength range 10-35 nm. This measurement resolves previously conflicting data sets, where disagreement on optical constants of copper in the extreme ultraviolet most likely arises from inadvertent oxidation of samples before measurement.
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