Antiphase domains are seen in single crystal gamma lithium aluminate (gamma-LiAlO2) with 16.7 nm periodicity in the <110> direction. Alternate domains have a (1/2) [001] shift. Beta phase lithium aluminate (beta-LiAlO2) is seen to form on the surface of the as-received wafers with an epitaxial strain limited relationship with the bulk gamma phase. The orthorhombic beta phase aligns with the a and b axes (0.528 and 0.630 nm) matching with the tetragonal gamma phase's a and c axes (0.5168 and 0.6268 nm). The gamma and beta phases are seen to have different etch rates. The beta phase converts back to the gamma phase above 450°C.
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