Demonstration of Microcantilever Array with Simultaneous Readout Using an In-Plane Photonic Transduction Method

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Permanent URL	http://hdl.lib.byu.edu/1877/2138
Title	Demonstration of Microcantilever Array with Simultaneous Readout Using an In-Plane Photonic Transduction Method
BYU Creator	Kim, Seunghyun Nordin, Gregory P.
Creator	Anderson, Ryan Hu, Weisheng Qian, Yusheng Song, Jiguo Wook Noh, Jong
Keywords	microcantilever; array; simultaenous readout; phtonoic transduction; waveguide
Description/Abstract	We demonstrate a microcantilever array with an in-plane photonic transduction method for simultaneous readout of each microcantilever. The array is fabricated on a silicon-on-insulator substrate. Rib waveguides in conjunction with a compact waveguide splitter network comprised of trench-based splitters and trench-based bends route light from a single optical input to each microcantilever on the chip. Light propagates down a rib waveguide integrated into the microcantilever and, at the free end of the microcantilever, crosses a small gap. Light is captured in static asymmetric multimode waveguides that terminate in Y-branches, the outputs of which are imaged onto an InGaAs line scan camera. A differential signal for each microcantilever is simultaneously formed from the two outputs of the corresponding Y-branch. We demonstrate that reasonable signal uniformity is obtained with a scaled differential signal for seven out of nine surviving microcantilevers in an array.
Source	W. Hu, R. Anderson, Y. Qian, J. Song, J.W. Noh, S. Kim, G.P. Nordin, "Demonstration of microcantilever array with simultaneous readout using in-plane photonic transduction method" Rev. Sci. Instr. 80, 085101, pp. 1-7 (2009). http://link.aip.org/link/?RSINAK/80/085101/1;
Publisher	American Institute of Physics
Date Original	2009
Date Digital	2010-02-25
Language	English eng en
Publication Type	Articles
Type	Text
Format	application/pdf
Owning Institution	Brigham Young University
BYU College	Ira A. Fulton College of Engineering and Technology
BYU Department	Electrical and Computer Engineering
Copyright Status	(c) 2009 American Institue of Physics;
Copyright Use Information	http://www.lib.byu.edu/generic_copyright.html

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Demonstration of Microcantilever Array with Simultaneous Readout Using an In-Plane Photonic Transduction Method

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