In-Plane Photonic Transduction of Silicon-On-Insulator Microcantilevers

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Permanent URL	http://hdl.lib.byu.edu/1877/2151
Title	In-Plane Photonic Transduction of Silicon-On-Insulator Microcantilevers
BYU Creator	Anderson, Ryan Kim, Seunghyun Nordin, Gregory P. Wook Noh, Jong
Creator	Cardenas, Jaime
Keywords	sensors; integrated optics devices
Description/Abstract	We demonstrate an in-plane photonic transduction method for microcantilevers, which have been widely investigated for sensor applications. In our approach the microcantilever is etched to form a single mode rib waveguide. Light propagates down the microcantilever and crosses a small gap at the free end of the microcantilever, some of which is captured by an asymmetrical multimode waveguide that terminates in a Y-branch. The Y-branch outputs are used to form a differential signal that is monotonically dependent on microcantilever deflection. The measured differential signal matches simulation when microcantilever rotation is properly accounted for. The measured differential signal sensitivity is 1.4 x 10-4 nm-1 and the minimum detectable deflection is 0.35 nm.
Source	J. W. Noh, R. Anderson, S. Kim, J. Cardenas, G. P. Nordin, "In-plane photonic transduction of silicon-on-insulator microcantilevers" Optics Express 16(16), pp. 12114-12123 (2008). http://www.opticsexpress.org/abstract.cfm?uri=oe-16-16-12114.;
Publisher	Optical Society of America
Date Original	2008
Date Digital	2010-03-03
Language	English eng en
Publication Type	Articles
Type	Text
Format	application/pdf
Owning Institution	Brigham Young University
BYU College	Ira A. Fulton College of Engineering and Technology
BYU Department	Electrical and Computer Engineering
Copyright Status	(c) 2008 Optical Society of America
Copyright Use Information	http://www.lib.byu.edu/generic_copyright.html

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In-Plane Photonic Transduction of Silicon-On-Insulator Microcantilevers

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